HIWIN DMT rotary tables are ultra-flat, backlash-free direct drive rotary axes with a large hollow shaft, featuring an external rotation design with high thrust force density and a highly rigid structure. Used in semiconductor production and inspection, the extremely flat, dynamic and maintenance-free rotary axes deliver high positioning accuracy and synchronisation quality despite their minimal height.
The tilt-resistant, backlash-free design achieves a high torque density in an ultra-compact form factor, while the very low profile allows for very large shaft diameters, offering maximum design flexibility. High-resolution encoders are available as incremental or absolute interface types.
The large hollow shaft allows the passage of whole wafers up to 12 inches in size, or applications with transmitted light. CAD data and technical data sheets are available for download.